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TURBOVAC 90i, 38 l/s, 24/48 V DC, 40 ISO-KF

TURBOVAC 90 i / DN 40 KF Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or ultrahigh v... Read more
Prt No. 810011V1000
225 l/s
290 l/s
38 l/s
430 l/s
720 l/s
90 l/s
(i) Standard Frequency Drive
(iX) Enhanced Frequency Drive
DN 100 CF
DN 100 ISO-K
DN 40 ISO-KF
DN 160 CF
DN 160 ISO-K
DN 63 CF
DN 63 ISO-K
1
$3,135.00

Built to Order

Sold by Leybold

Description

TURBOVAC 90 i / DN 40 KF Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or ultrahigh vacuum like, for example, in research, development or in industrial fields like the semiconductor industry, analytical instrumentation or coating technology. Principle of Operation In principle, the turbomolecular pump is a turbine rapidly revolving in a housing where the rotor stages of the turbine Sectional drawing of a turbomolecular pump (TURBOVAC i) are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction. By means of a momentum transfer from the rotating rotor blades to the gas molecules their initially nondirectional thermal motion is changed in to a directional motion from the inlet flange of the pump in the axial direction towards the forevacuum flange. In the molecular flow range (i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr)) the mean fr... Read more

Technical specification

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Sold ByLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldSold By
Compression ratio Ar1.00E+11>1e11>1e111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+11Compression ratio Ar
Compression ratio H25.00E+074.4e64.4e61.00E+061.00E+061.00E+061.00E+061.00E+061.00E+062.00E+072.00E+075.00E+072.00E+072.00E+071.00E+061.00E+065.00E+075.00E+075.00E+07Compression ratio H2
Compression ratio He1.00E+081.3e81.3e81.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+08Compression ratio He
Compression ratio N21.00E+11>1e11>1e111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+11Compression ratio N2
Cooling water connection6x1 hose alternative, G 1/8" screw in thread 1/4" hoseplug connection for 6x1 hose / alternatively G 1/8-in. screw-in threadplug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternativeCooling water connection
Cooling water consumption l/h30-606060G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"Cooling water consumption l/h
Cooling water pressure bar6-Mar6650-10050-10050-10050-10050-10050-10030-6030-6030-6030-6030-6050-10050-10030-6030-6030-60Cooling water pressure bar
Cooling water temperature C/F+15 to 35 (+59 to +95)15 to 3515 to 353 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 6Cooling water temperature C/F
Corrosive ResistantNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoCorrosive Resistant
Dimensions Height mm2015656216245222222216232196196200205205232245194200194Dimensions Height mm
Dimensions Length mm-213213----------------Dimensions Length mm
Dimensions Width mm105213213165165165165165165131131105131131165165105105105Dimensions Width mm
Gas throughput Ar mbar l/sTBD3.53.52222223333322333Gas throughput Ar mbar l/s
Gas throughput H2 mbar l/sTBD>15>15888888111111111188111111Gas throughput H2 mbar l/s
Gas throughput He mbar l/sTBD212188888866116688111111Gas throughput He mbar l/s
Gas throughput N2 mbar l/sTBD14144.54.54.54.54.54.56610664.54.5101010Gas throughput N2 mbar l/s
Inlet connectionDN 40 ISO-KFDN 160 CFDN 160 ISO-KDN 160 ISO-K100 CF160 CF160 CFDN 160 ISO-KDN 100 ISO-KDN 100 ISO-KDN 100 ISO-K63 CF100 CF100 CFDN 100 ISO-K100 CFDN 63 ISO-K63 CFDN 63 ISO-KInlet connection
Integrated vacuum system controllernononononononononononononononononono41Integrated vacuum system controller
Lubrication TypeDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryLubrication Type
Mains Connection24/48 V DC ±10%--nonononononononononononononononoMains Connection
Max. current consumption ------------------10A at 24 V DCMax. current consumption
Max. foreline pressure for N2 Torr10--777777101010101077101010Max. foreline pressure for N2 Torr
Max. foreline pressure for N2 mbar14151510101010101014141414141010141414Max. foreline pressure for N2 mbar
Max. power consumption W240--240240240240240240240240240240240240240240240240Max. power consumption W
Noise level dB(A)-5050---------------41Noise level dB(A)
Nominal rotation speed rpm72000492004920060000600006000060000600006000072000720007200072000720006000060000720007200072000Nominal rotation speed rpm
Operating temperature range C(F)+5 to +45 (+41 to +113)+5 to +40+5 to +40+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)Operating temperature range C(F)
Optional coolingAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterOptional cooling
Outlet connectionDN 16 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFOutlet connection
Power consumption at ultimate pressure (24V/48V) W7/9.5--240240240240240240240240240240240240240240240240Power consumption at ultimate pressure (24V/48V) W
Product ConditionNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewProduct Condition
Product Life Cycle StatusActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveProduct Life Cycle Status
Protection Class IP404040Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Protection Class IP
Prt No.810011V1000 ✔840081V1000840071V1000830071V1000830061V3300830081V1000830081V3300830071V3300830051V1000820051V3300820051V1000810041V1000820061V1000820061V3300830051V3300830061V1000810031V3300810041V3300810031V1000Prt No.
Pumping Speed Ar l/s3665565540026040040040026021021083210210260260838383Pumping Speed Ar l/s
Pumping Speed H2 l/s3175575542035042042042035021021078210210350350787878Pumping Speed H2 l/s
Pumping Speed He l/s3985085044036044044044036025025090250250360360909090Pumping Speed He l/s
Pumping Speed N2 l/s3872072043029043043043029022522590225225290290909090Pumping Speed N2 l/s
Pumping Speed Range0-99 l/s685-900 l/s685-900 l/s400-650 l/s220-365 l/s400-650 l/s400-650 l/s400-650 l/s220-365 l/s220-365 l/s220-365 l/s0-99 l/s220-365 l/s220-365 l/s220-365 l/s220-365 l/s0-99 l/s0-99 l/s0-99 l/sPumping Speed Range
Rotation speed adaptation %62 - 100%--62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%Rotation speed adaptation %
Run-up Time min2--5555552222255222Run-up Time min
Standard coolingConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionStandard cooling
Technology TypeMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpTechnology Type
Ultimate Pressure Torr<6.0x10-8--<6.0x10-8<3.75x10-10<3.75x10-10<3.75x10-10<6.0x10-8<6.0x10-8<6.0x10-8<6.0x10-8<3.75x10-10<3.75x10-10<3.75x10-10<6.0x10-8<3.75x10-10<6.0x10-8<3.75x10-10<6.0x10-8Ultimate Pressure Torr
Ultimate Pressure mbar<8.0x10-83e-103e-8<8.0x10-8<5.0x10-10<5.0x10-10<5.0x10-10<8.0x10-8<8.0x10-8<8.0x10-8<8.0x10-8<5.0x10-10<5.0x10-10<5.0x10-10<8.0x10-8<5.0x10-10<8.0x10-8<5.0x10-10<8.0x10-8Ultimate Pressure mbar
Vacuum RangeHigh Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Vacuum Range
Weight lb643321726272818169810141517257116Weight lb
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