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TURBOVAC 90i -90l/s, 24/48 V DC, DN 63 ISO-K [CERTIFIED REBUILT]

TURBOVAC 90 i / DN 63 ISO-K Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or ultrahig... Read more
Prt No. 810031V1000R
225 l/s
290 l/s
430 l/s
720 l/s
38 l/s
90 l/s
(i) Standard Frequency Drive
(iX) Enhanced Frequency Drive
DN 100 CF
DN 100 ISO-K
DN 160 CF
DN 160 ISO-K
DN 40 ISO-KF
DN 63 CF
DN 63 ISO-K
1
$3,591.00

Out of stockClick for availability
Lead time: 10 weeks

Sold by Leybold

Description

TURBOVAC 90 i / DN 63 ISO-K Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or ultrahigh vacuum like, for example, in research, development or in industrial fields like the semiconductor industry, analytical instrumentation or coating technology. Principle of Operation In principle, the turbomolecular pump is a turbine rapidly revolving in a housing where the rotor stages of the turbine Sectional drawing of a turbomolecular pump (TURBOVAC i) are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction. By means of a momentum transfer from the rotating rotor blades to the gas molecules their initially nondirectional thermal motion is changed in to a directional motion from the inlet flange of the pump in the axial direction towards the forevacuum flange. In the molecular flow range (i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr)) the mean... Read more

Technical specification

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Customer Rating---------------------Customer Rating
Price
$3,591.00
$13,866.60
$25,212.00
$13,223.65
$24,043.00
$12,802.90
$23,278.00
$7,740.15
$14,073.00
$8,333.60
$15,152.00
$8,026.15
$14,593.00
$9,040.90
$16,438.00
$8,745.00
$15,900.00
$7,022.95
$12,769.00
$6,600.55
$12,001.00
$6,123.70
$11,134.00
$4,545.20
$8,264.00
$6,472.40
$11,768.00
$6,888.75
$12,525.00
$8,026.15
$14,593.00
$7,327.65
$13,323.00
$4,784.45
$8,699.00
$5,024.25
$9,135.00
$4,413.20
$8,024.00
$4,306.50
$7,830.00
Price
Sold ByLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldSold By
Compression ratio Ar1.00E+11>1e11>1e11>1e111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+11Compression ratio Ar
Compression ratio H25.00E+074.4e64.4e64.4e61.00E+061.00E+061.00E+061.00E+061.00E+061.00E+062.00E+072.00E+075.00E+072.00E+072.00E+071.00E+061.00E+065.00E+075.00E+075.00E+075.00E+07Compression ratio H2
Compression ratio He1.00E+081.3e81.3e81.3e81.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+08Compression ratio He
Compression ratio N21.00E+11>1e11>1e11>1e111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+11Compression ratio N2
Cooling water connection6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternativeplug connection for 6x1 hose / alternatively G 1/8-in. screw-in threadplug connection for 6x1 hose / alternatively G 1/8-in. screw-in threadplug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8" screw in thread 1/4" hose6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternativeCooling water connection
Cooling water consumption l/hG 1/8" scr""1 ho"606060G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"30-60G 1/8" scr""1 ho"Cooling water consumption l/h
Cooling water pressure bar30-6066650-10050-10050-10050-10050-10050-10030-6030-6030-6030-6030-6050-10050-10030-6030-606-Mar30-60Cooling water pressure bar
Cooling water temperature C/F3-615 to 3515 to 3515 to 353 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 6+15 to 35 (+59 to +95)3 - 6Cooling water temperature C/F
Corrosive ResistantNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoCorrosive Resistant
Dimensions Height mm194-5656216245222222216232196196200205205232245194200201194Dimensions Height mm
Dimensions Length mm--213213-----------------Dimensions Length mm
Dimensions Width mm105-213213165165165165165165131131105131131165165105105105105Dimensions Width mm
Gas throughput Ar mbar l/s33.53.53.5222222333332233TBD3Gas throughput Ar mbar l/s
Gas throughput H2 mbar l/s11>15>15>158888881111111111881111TBD11Gas throughput H2 mbar l/s
Gas throughput He mbar l/s11212121888888661166881111TBD11Gas throughput He mbar l/s
Gas throughput N2 mbar l/s101414144.54.54.54.54.54.56610664.54.51010TBD10Gas throughput N2 mbar l/s
Inlet connectionDN 63 ISO-KDN 160 CFDN 160 CFDN 160 ISO-KDN 160 ISO-K100 CF160 CF160 CFDN 160 ISO-KDN 100 ISO-KDN 100 ISO-KDN 100 ISO-K63 CF100 CF100 CFDN 100 ISO-K100 CFDN 63 ISO-K63 CFDN 40 ISO-KFDN 63 ISO-KInlet connection
Integrated vacuum system controller41-nononononononononononononononononono41Integrated vacuum system controller
Lubrication TypeDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryLubrication Type
Mains Connection----nonononononononononononononono24/48 V DC ±10%noMains Connection
Max. current consumption 10A at 24 V DC-------------------10A at 24 V DCMax. current consumption
Max. foreline pressure for N2 Torr10---77777710101010107710101010Max. foreline pressure for N2 Torr
Max. foreline pressure for N2 mbar141515151010101010101414141414101014141414Max. foreline pressure for N2 mbar
Max. power consumption W240---240240240240240240240240240240240240240240240240240Max. power consumption W
Noise level dB(A)41505050----------------41Noise level dB(A)
Nominal rotation speed rpm720004920049200492006000060000600006000060000600007200072000720007200072000600006000072000720007200072000Nominal rotation speed rpm
Operating temperature range C(F)+5 to +45 (+41 to +113)+5 to +40+5 to +40+5 to +40+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)Operating temperature range C(F)
Optional coolingAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterOptional cooling
Outlet connectionDN 16 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFOutlet connection
Power consumption at ultimate pressure (24V/48V) W240---2402402402402402402402402402402402402402402407/9.5240Power consumption at ultimate pressure (24V/48V) W
Product ConditionCertified RebuiltNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewProduct Condition
Product Life Cycle Status-ActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveProduct Life Cycle Status
Protection Class IPAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+404040Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC40Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Protection Class IP
Prt No.810031V1000R ✔840081V3300840081V1000840071V1000830071V1000830061V3300830081V1000830081V3300830071V3300830051V1000820051V3300820051V1000810041V1000820061V1000820061V3300830051V3300830061V1000810031V3300810041V3300810011V1000810031V1000Prt No.
Pumping Speed Ar l/s836556556554002604004004002602102108321021026026083833683Pumping Speed Ar l/s
Pumping Speed H2 l/s787557557554203504204204203502102107821021035035078783178Pumping Speed H2 l/s
Pumping Speed He l/s908508508504403604404404403602502509025025036036090903990Pumping Speed He l/s
Pumping Speed N2 l/s-7207207204302904304304302902252259022522529029090903890Pumping Speed N2 l/s
Pumping Speed Range0-99 l/s685-900 l/s685-900 l/s685-900 l/s400-650 l/s220-365 l/s400-650 l/s400-650 l/s400-650 l/s220-365 l/s220-365 l/s220-365 l/s0-99 l/s220-365 l/s220-365 l/s220-365 l/s220-365 l/s0-99 l/s0-99 l/s0-99 l/s0-99 l/sPumping Speed Range
Rotation speed adaptation %62 - 100%---62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%Rotation speed adaptation %
Run-up Time min2---55555522222552222Run-up Time min
Standard coolingConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionStandard cooling
Technology TypeMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpTechnology Type
Ultimate Pressure Torr<6.0x10-8---<6.0x10-8<3.75x10-10<3.75x10-10<3.75x10-10<6.0x10-8<6.0x10-8<6.0x10-8<6.0x10-8<3.75x10-10<3.75x10-10<3.75x10-10<6.0x10-8<3.75x10-10<6.0x10-8<3.75x10-10<6.0x10-8<6.0x10-8Ultimate Pressure Torr
Ultimate Pressure mbar<8.0x10-83e-103e-103e-8<8.0x10-8<5.0x10-10<5.0x10-10<5.0x10-10<8.0x10-8<8.0x10-8<8.0x10-8<8.0x10-8<5.0x10-10<5.0x10-10<5.0x10-10<8.0x10-8<5.0x10-10<8.0x10-8<5.0x10-10<8.0x10-8<8.0x10-8Ultimate Pressure mbar
Vacuum RangeHigh Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Vacuum Range
Weight (kg)-20.1-------------------Weight (kg)
Weight lb6-433217262728181698101415172571166Weight lb

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