TURBOVAC 90iX - 90l/s, 24/48 V DC, DN 63 CF

TURBOVAC 90 iX / RS 485 / DN 63 CF Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or u... Read more

Prt No. 810041V3300

Pumping Speed

225 l/s

290 l/s

430 l/s

720 l/s

900 l/s

1250 l/s

1380 l/s

38 l/s

90 l/s

Version

(i) Standard Frequency Drive

(iR) Radiation Standard Frequency Drive

(iX) Enhanced Frequency Drive

Inlet Flange

DN 100 CF

DN 100 ISO-K

DN 160 CF

DN 160 ISO-K

DN 200 CF

DN 200 ISO-F

DN 200 ISO-K

DN 250 ISO-F

DN 250 ISO-K

DN 40 ISO-KF

DN 63 CF

DN 63 ISO-K

Quantity

Price

$9,776.00

$6,843.00

Out of stock. Click for availability

Lead time: 15 weeks

Sold by Leybold

Description

TURBOVAC 90 iX / RS 485 / DN 63 CF Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or ultrahigh vacuum like, for example, in research, development or in industrial fields like the semiconductor industry, analytical instrumentation or coating technology. Principle of Operation In principle, the turbomolecular pump is a turbine rapidly revolving in a housing where the rotor stages of the turbine Sectional drawing of a turbomolecular pump (TURBOVAC i) are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction. By means of a momentum transfer from the rotating rotor blades to the gas molecules their initially nondirectional thermal motion is changed in to a directional motion from the inlet flange of the pump in the axial direction towards the forevacuum flange. In the molecular flow range (i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr)) t... Read more

Technical specification

Be sure to check with the seller important parameter for you and inspect the goods upon receipt

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Customer Rating	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Customer Rating
Price	$6,843.00 $9,776.00	$20,619.00 $29,455.00	$18,374.00 $26,248.00	$18,925.00 $27,036.00	$17,468.00 $24,954.00	$16,896.00 $24,137.00	$10,602.00 $15,146.00	$10,223.00 $14,604.00	$9,680.00 $13,829.00	$9,276.00 $13,252.00	$6,004.00 $8,577.00	$20,372.00 $29,103.00	$19,979.00 $28,542.00	$20,078.00 $28,683.00	$19,510.00 $27,872.00	$18,943.00 $27,061.00	$18,423.00 $26,318.00	$18,884.00 $26,977.00	$3,591.00	$18,008.00 $25,726.00	$17,436.00 $24,908.00	$10,541.00 $15,058.00	$11,349.00 $16,213.00	$10,931.00 $15,615.00	$12,312.00 $17,589.00	$11,910.00 $17,014.00	$9,565.00 $13,664.00	$8,989.00 $12,842.00	$8,341.00 $11,915.00	$6,190.00 $8,843.00	$8,815.00 $12,593.00	$9,382.00 $13,403.00	$10,931.00 $15,615.00	$9,979.00 $14,256.00	$6,516.00 $9,309.00	$6,010.00 $8,586.00	$5,865.00 $8,378.00	Price
Sold By	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Leybold	Sold By
Compression ratio Ar	1.00E+11	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	>1e11	>1e11	1.00E+11	>1e11	>1e11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	Compression ratio Ar
Compression ratio H2	5.00E+07	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	4.4e6	4.4e6	5.00E+07	4.4e6	4.4e6	1.00E+06	1.00E+06	1.00E+06	1.00E+06	1.00E+06	1.00E+06	2.00E+07	2.00E+07	5.00E+07	2.00E+07	2.00E+07	1.00E+06	1.00E+06	5.00E+07	5.00E+07	5.00E+07	Compression ratio H2
Compression ratio He	1.00E+08	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	1.3e8	1.3e8	1.00E+08	1.3e8	1.3e8	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	Compression ratio He
Compression ratio N2	1.00E+11	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	>1e11	>1e11	1.00E+11	>1e11	>1e11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	Compression ratio N2
Cooling water connection	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread	plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread	plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8" screw in thread 1/4" hose	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	Cooling water connection
Cooling water consumption l/h	G 1/8" scr""1 ho"	-	-	-	-	-	-	-	-	-	-	-	60	60	-	-	60	60	G 1/8" scr""1 ho"	60	60	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	30-60	G 1/8" scr""1 ho"	Cooling water consumption l/h
Cooling water pressure bar	30-60	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	6	6	30-60	6	6	50-100	50-100	50-100	50-100	50-100	50-100	30-60	30-60	30-60	30-60	30-60	50-100	50-100	30-60	6-Mar	30-60	Cooling water pressure bar
Cooling water temperature C/F	3 - 6	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	15 to 35	15 to 35	3-6	15 to 35	15 to 35	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	+15 to 35 (+59 to +95)	3 - 6	Cooling water temperature C/F
Corrosive Resistant	No	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	Corrosive Resistant
Dimensions Height mm	200	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	194	56	56	216	245	222	222	216	232	196	196	200	205	205	232	245	194	201	194	Dimensions Height mm
Dimensions Length mm	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	213	213	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Dimensions Length mm
Dimensions Width mm	105	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	105	213	213	165	165	165	165	165	165	131	131	105	131	131	165	165	105	105	105	Dimensions Width mm
Forevacuum flange (DN)	-	-	-	-	-	-	-	-	-	-	-	-	-	DN 40 KF	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Forevacuum flange (DN)
Gas throughput Ar mbar l/s	3	-	-	-	-	-	-	-	-	-	-	-	12	12	-	-	3.5	3.5	3	3.5	3.5	2	2	2	2	2	2	3	3	3	3	3	2	2	3	TBD	3	Gas throughput Ar mbar l/s
Gas throughput H2 mbar l/s	11	-	-	-	-	-	-	-	-	-	-	-	10	10	-	-	>15	>15	11	>15	>15	8	8	8	8	8	8	11	11	11	11	11	8	8	11	TBD	11	Gas throughput H2 mbar l/s
Gas throughput He mbar l/s	11	-	-	-	-	-	-	-	-	-	-	-	18	18	-	-	21	21	11	21	21	8	8	8	8	8	8	6	6	11	6	6	8	8	11	TBD	11	Gas throughput He mbar l/s
Gas throughput N2 mbar l/s	10	-	-	-	-	-	-	-	-	-	-	-	17	17	-	-	14	14	10	14	14	4.5	4.5	4.5	4.5	4.5	4.5	6	6	10	6	6	4.5	4.5	10	TBD	10	Gas throughput N2 mbar l/s
Inlet connection	63 CF	-	-	-	-	-	-	-	-	-	-	-	-	-	DN 200 CF	DN 200 ISO-K	DN 160 ISO-K	DN 160 CF	DN 63 ISO-K	DN 160 CF	DN 160 ISO-K	DN 160 ISO-K	100 CF	160 CF	160 CF	DN 160 ISO-K	DN 100 ISO-K	DN 100 ISO-K	DN 100 ISO-K	63 CF	100 CF	100 CF	DN 100 ISO-K	100 CF	DN 63 ISO-K	DN 40 ISO-KF	DN 63 ISO-K	Inlet connection
Integrated vacuum system controller	no	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	41	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	41	Integrated vacuum system controller
Lubrication Type	Dry	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Lubrication Type
Mains Connection	no	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	no	no	no	no	no	no	no	no	no	no	no	no	no	no	24/48 V DC ±10%	no	Mains Connection
Max. current consumption	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	10A at 24 V DC	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	10A at 24 V DC	Max. current consumption
Max. foreline pressure for N2 Torr	10	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	10	-	-	7	7	7	7	7	7	10	10	10	10	10	7	7	10	10	10	Max. foreline pressure for N2 Torr
Max. foreline pressure for N2 mbar	14	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	15	15	14	15	15	10	10	10	10	10	10	14	14	14	14	14	10	10	14	14	14	Max. foreline pressure for N2 mbar
Max. power consumption W	240	-	-	-	-	-	-	-	-	-	-	-	800	800	-	-	-	-	240	-	-	240	240	240	240	240	240	240	240	240	240	240	240	240	240	240	240	Max. power consumption W
Noise level dB(A)	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	50	50	41	50	50	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	41	Noise level dB(A)
Nominal rotation speed rpm	72000	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	49200	49200	72000	49200	49200	60000	60000	60000	60000	60000	60000	72000	72000	72000	72000	72000	60000	60000	72000	72000	72000	Nominal rotation speed rpm
Operating temperature range C(F)	+5 to +45 (+41 to +113)	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	+5 to +40	+5 to +40	+5 to +45 (+41 to +113)	+5 to +40	+5 to +40	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	Operating temperature range C(F)
Optional cooling	Air/Water	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Optional cooling
Outlet connection	DN 16 ISO-KF	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	DN 25 ISO-KF	DN 25 ISO-KF	DN 16 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	Outlet connection
Permissible cooling water pressure (bar)	-	-	-	-	-	-	-	-	-	-	-	-	6	6	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Permissible cooling water pressure (bar)
Permissible cooling water temperature °C	-	-	-	-	-	-	-	-	-	-	-	-	15 to 35	15 to 35	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Permissible cooling water temperature °C
Power consumption at ultimate pressure (24V/48V) W	240	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	240	-	-	240	240	240	240	240	240	240	240	240	240	240	240	240	240	7/9.5	240	Power consumption at ultimate pressure (24V/48V) W
Power consumption at ultimate pressure W	-	-	-	-	-	-	-	-	-	-	-	-	50	50	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Power consumption at ultimate pressure W
Product Condition	New	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	New	New	Certified Rebuilt	New	New	New	New	New	New	New	New	New	New	New	New	New	New	New	New	New	New	Product Condition
Product Life Cycle Status	Active	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Active	Active	-	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Product Life Cycle Status
Protection Class IP	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	40	40	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	40	40	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	40	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	Protection Class IP
Prt No.	810041V3300 ✔	850132V1000	840091A00	840111A00	840081A00	840071A00	830081A00	830071A00	830061A00	830051A00	810041A00	850122V1000	850102V1000	850092V1000	840111V1000	840091V1000	840071V3300	840081V3300	810031V1000R	840081V1000	840071V1000	830071V1000	830061V3300	830081V1000	830081V3300	830071V3300	830051V1000	820051V3300	820051V1000	810041V1000	820061V1000	820061V3300	830051V3300	830061V1000	810031V3300	810011V1000	810031V1000	Prt No.
Pumping Speed Ar l/s	83	-	-	-	-	-	-	-	-	-	-	-	1150	1150	840	840	655	655	83	655	655	400	260	400	400	400	260	210	210	83	210	210	260	260	83	36	83	Pumping Speed Ar l/s
Pumping Speed H2 l/s	78	-	-	-	-	-	-	-	-	-	-	-	1150	1150	770	770	755	755	78	755	755	420	350	420	420	420	350	210	210	78	210	210	350	350	78	31	78	Pumping Speed H2 l/s
Pumping Speed He l/s	90	-	-	-	-	-	-	-	-	-	-	-	1350	1350	925	925	850	850	90	850	850	440	360	440	440	440	360	250	250	90	250	250	360	360	90	39	90	Pumping Speed He l/s
Pumping Speed N2 l/s	90	-	-	-	-	-	-	-	-	-	-	-	1250	1250	900	900	720	720	-	720	720	430	290	430	430	430	290	225	225	90	225	225	290	290	90	38	90	Pumping Speed N2 l/s
Pumping Speed Range	0-99 l/s	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	685-900 l/s	685-900 l/s	0-99 l/s	685-900 l/s	685-900 l/s	400-650 l/s	220-365 l/s	400-650 l/s	400-650 l/s	400-650 l/s	220-365 l/s	220-365 l/s	220-365 l/s	0-99 l/s	220-365 l/s	220-365 l/s	220-365 l/s	220-365 l/s	0-99 l/s	0-99 l/s	0-99 l/s	Pumping Speed Range
Rotation speed adaptation %	62 - 100%	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	62 - 100%	-	-	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	Rotation speed adaptation %
Run-up Time min	2	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	2	-	-	5	5	5	5	5	5	2	2	2	2	2	5	5	2	2	2	Run-up Time min
Standard cooling	Convection	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Standard cooling
Technology Type	Mechanical Turbo Pump	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Technology Type
Ultimate Pressure Torr	<3.75x10-10	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	<6.0x10-8	-	-	<6.0x10-8	<3.75x10-10	<3.75x10-10	<3.75x10-10	<6.0x10-8	<6.0x10-8	<6.0x10-8	<6.0x10-8	<3.75x10-10	<3.75x10-10	<3.75x10-10	<6.0x10-8	<3.75x10-10	<6.0x10-8	<6.0x10-8	<6.0x10-8	Ultimate Pressure Torr
Ultimate Pressure mbar	<5.0x10-10	-	-	-	-	-	-	-	-	-	-	-	-	< 7.5 x 10-9	-	-	3e-10	3e-10	<8.0x10-8	3e-10	3e-8	<8.0x10-8	<5.0x10-10	<5.0x10-10	<5.0x10-10	<8.0x10-8	<8.0x10-8	<8.0x10-8	<8.0x10-8	<5.0x10-10	<5.0x10-10	<5.0x10-10	<8.0x10-8	<5.0x10-10	<8.0x10-8	<8.0x10-8	<8.0x10-8	Ultimate Pressure mbar
Ultimate Total Pressure mbar	-	-	-	-	-	-	-	-	-	-	-	-	< 7.5 x 10-9	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Ultimate Total Pressure mbar
Vacuum Range	Ultra High Vacuum (10-9 - 10-12 mbar)	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	High Vacuum (10-4 - 10-8 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	Vacuum Range
Weight (kg)	-	-	-	-	-	-	-	-	-	-	-	-	24.3	23.5	-	-	15.1	20.1	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Weight (kg)
Weight lb	11	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	6	43	32	17	26	27	28	18	16	9	8	10	14	15	17	25	7	6	6	Weight lb