TURBOVAC 350iX - 290l/s, 24/48 V DC, 100 ISO-K

TURBOVAC 350 iX, RS 485; DN 100 ISO-K Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high o... Read more

Prt No. 830051V3300

Pumping Speed

225 l/s

290 l/s

38 l/s

430 l/s

720 l/s

90 l/s

Version

(i) Standard Frequency Drive

(iX) Enhanced Frequency Drive

Inlet Flange

DN 100 CF

DN 100 ISO-K

DN 40 ISO-KF

DN 160 CF

DN 160 ISO-K

DN 63 CF

DN 63 ISO-K

Quantity

Price

$12,143.00

$6,071.50

Built to Order.

Sold by Leybold

Description

TURBOVAC 350 iX, RS 485; DN 100 ISO-K Turbomolecular vacuum pumps (TURBOVAC) are used in applications which require a clean high or ultrahigh vacuum like, for example, in research, development or in industrial fields like the semiconductor industry, analytical instrumentation or coating technology. Principle of Operation In principle, the turbomolecular pump is a turbine rapidly revolving in a housing where the rotor stages of the turbine Sectional drawing of a turbomolecular pump (TURBOVAC i) are equipped with a number of rotor blades. Located between the rotating rotor blades are stationary stator disks with blades arranged in the opposite direction. By means of a momentum transfer from the rotating rotor blades to the gas molecules their initially nondirectional thermal motion is changed in to a directional motion from the inlet flange of the pump in the axial direction towards the forevacuum flange. In the molecular flow range (i.e. at pressures below 10-3 mbar (0.75 x 10-3 Torr)... Read more

Technical specification

Be sure to check with the seller important parameter for you and inspect the goods upon receipt

	TURBOVAC 350iX - 290l/s, 24/48 V DC, 100 ISO-K…	TURBOVAC 850 i / DN 160 CF…	TURBOVAC 850 i / DN 160 ISO-K…	TURBOVAC 450i - 430l/s, 24/48 V DC, 160 ISO-K…	TURBOVAC 350iX - 290l/s, 24/48 V DC, 100 CF…	TURBOVAC 450i - 430l/s, 24/48 V DC, 160 CF…	TURBOVAC 450iX - 430l/s, 24/48 V DC, 160 CF…	TURBOVAC 450ix - 430l/s, 24/48 V DC, 160 ISO-K…	TURBOVAC 350i - 290l/s, 24/48 V DC, 100 ISO-K…	TURBOVAC 250iX - 225l/s, 24/48 V DC, 100 ISO-K…	TURBOVAC 250i - 225l/s, 24/48 V DC, 100 ISO-K…	TURBOVAC 90i - 90l/s, 24/48 V DC, 63 CF…	TURBOVAC 250i - 225l/s, 24/48 V DC, 100 CF…	TURBOVAC 250-iX - 225l/s, 24/48 V DC, 100 CF…	TURBOVAC 350i - 290l/s, 24/48 V DC, 100 CF…	TURBOVAC 90iX -90l/s, 24/48 V DC, 63 ISO-K…	TURBOVAC 90iX - 90l/s, 24/48 V DC, 63 CF…	TURBOVAC 90i, 38 l/s, 24/48 V DC, 40 ISO-KF…	TURBOVAC 90i -90l/s, 24/48 V DC, 63 ISO-K…
Customer Rating	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Customer Rating
Price	$6,071.50 $12,143.00	$10,383.50 $20,767.00	$10,083.00 $20,166.00	$5,854.00 $11,708.00	$6,303.00 $12,606.00	$6,071.50 $12,143.00	$6,838.50 $13,677.00	$6,614.50 $13,229.00	$5,312.00 $10,624.00	$4,993.00 $9,986.00	$4,631.50 $9,263.00	$3,437.00 $6,874.00	$4,896.00 $9,792.00	$5,210.00 $10,420.00	$5,542.50 $11,085.00	$3,618.50 $7,237.00	$3,799.50 $7,599.00	$3,337.50 $6,675.00	$3,256.50 $6,513.00	Price
Compression ratio Ar	1.00E+11	>1e11	>1e11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	Compression ratio Ar
Compression ratio H2	1.00E+06	4.4e6	4.4e6	1.00E+06	1.00E+06	1.00E+06	1.00E+06	1.00E+06	1.00E+06	2.00E+07	2.00E+07	5.00E+07	2.00E+07	2.00E+07	1.00E+06	5.00E+07	5.00E+07	5.00E+07	5.00E+07	Compression ratio H2
Compression ratio He	1.00E+08	1.3e8	1.3e8	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	1.00E+08	Compression ratio He
Compression ratio N2	1.00E+11	>1e11	>1e11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	1.00E+11	Compression ratio N2
Cooling water connection	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread	plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	6x1 hose alternative, G 1/8" screw in thread 1/4" hose	6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative	Cooling water connection
Cooling water consumption l/h	G 1/8" scr""1 ho"	60	60	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	G 1/8" scr""1 ho"	30-60	G 1/8" scr""1 ho"	Cooling water consumption l/h
Cooling water pressure bar	50-100	6	6	50-100	50-100	50-100	50-100	50-100	50-100	30-60	30-60	30-60	30-60	30-60	50-100	30-60	30-60	6-Mar	30-60	Cooling water pressure bar
Cooling water temperature C/F	3 - 6	15 to 35	15 to 35	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	3 - 6	+15 to 35 (+59 to +95)	3 - 6	Cooling water temperature C/F
Corrosive Resistant	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	No	Corrosive Resistant
Dimensions Height mm	232	56	56	216	245	222	222	216	232	196	196	200	205	205	245	194	200	201	194	Dimensions Height mm
Dimensions Length mm	-	213	213	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	Dimensions Length mm
Dimensions Width mm	165	213	213	165	165	165	165	165	165	131	131	105	131	131	165	105	105	105	105	Dimensions Width mm
Gas throughput Ar mbar l/s	2	3.5	3.5	2	2	2	2	2	2	3	3	3	3	3	2	3	3	TBD	3	Gas throughput Ar mbar l/s
Gas throughput H2 mbar l/s	8	>15	>15	8	8	8	8	8	8	11	11	11	11	11	8	11	11	TBD	11	Gas throughput H2 mbar l/s
Gas throughput He mbar l/s	8	21	21	8	8	8	8	8	8	6	6	11	6	6	8	11	11	TBD	11	Gas throughput He mbar l/s
Gas throughput N2 mbar l/s	4.5	14	14	4.5	4.5	4.5	4.5	4.5	4.5	6	6	10	6	6	4.5	10	10	TBD	10	Gas throughput N2 mbar l/s
Inlet connection	DN 100 ISO-K	DN 160 CF	DN 160 ISO-K	DN 160 ISO-K	100 CF	160 CF	160 CF	DN 160 ISO-K	DN 100 ISO-K	DN 100 ISO-K	DN 100 ISO-K	63 CF	100 CF	100 CF	100 CF	DN 63 ISO-K	63 CF	DN 40 ISO-KF	DN 63 ISO-K	Inlet connection
Integrated vacuum system controller	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	no	41	Integrated vacuum system controller
Lubrication Type	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Dry	Lubrication Type
Mains Connection	no	-	-	no	no	no	no	no	no	no	no	no	no	no	no	no	no	24/48 V DC ±10%	no	Mains Connection
Max. current consumption	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	10A at 24 V DC	Max. current consumption
Max. foreline pressure for N2 Torr	7	-	-	7	7	7	7	7	7	10	10	10	10	10	7	10	10	10	10	Max. foreline pressure for N2 Torr
Max. foreline pressure for N2 mbar	10	15	15	10	10	10	10	10	10	14	14	14	14	14	10	14	14	14	14	Max. foreline pressure for N2 mbar
Max. power consumption W	240	-	-	240	240	240	240	240	240	240	240	240	240	240	240	240	240	240	240	Max. power consumption W
Noise level dB(A)	-	50	50	-	-	-	-	-	-	-	-	-	-	-	-	-	-	-	41	Noise level dB(A)
Nominal rotation speed rpm	60000	49200	49200	60000	60000	60000	60000	60000	60000	72000	72000	72000	72000	72000	60000	72000	72000	72000	72000	Nominal rotation speed rpm
Operating temperature range C(F)	+5 to +45 (+41 to +113)	+5 to +40	+5 to +40	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	+5 to +45 (+41 to +113)	Operating temperature range C(F)
Optional cooling	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Air/Water	Optional cooling
Outlet connection	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 25 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 25 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	DN 16 ISO-KF	Outlet connection
Power consumption at ultimate pressure (24V/48V) W	240	-	-	240	240	240	240	240	240	240	240	240	240	240	240	240	240	7/9.5	240	Power consumption at ultimate pressure (24V/48V) W
Product Condition	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	NEW	Product Condition
Product Life Cycle Status	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Active	Product Life Cycle Status
Protection Class IP	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	40	40	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC	40	Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+	Protection Class IP
Prt No.	830051V3300 ✔	840081V1000	840071V1000	830071V1000	830061V3300	830081V1000	830081V3300	830071V3300	830051V1000	820051V3300	820051V1000	810041V1000	820061V1000	820061V3300	830061V1000	810031V3300	810041V3300	810011V1000	810031V1000	Prt No.
Pumping Speed Ar l/s	260	655	655	400	260	400	400	400	260	210	210	83	210	210	260	83	83	36	83	Pumping Speed Ar l/s
Pumping Speed H2 l/s	350	755	755	420	350	420	420	420	350	210	210	78	210	210	350	78	78	31	78	Pumping Speed H2 l/s
Pumping Speed He l/s	360	850	850	440	360	440	440	440	360	250	250	90	250	250	360	90	90	39	90	Pumping Speed He l/s
Pumping Speed N2 l/s	290	720	720	430	290	430	430	430	290	225	225	90	225	225	290	90	90	38	90	Pumping Speed N2 l/s
Pumping Speed Range	220-365 l/s	685-900 l/s	685-900 l/s	400-650 l/s	220-365 l/s	400-650 l/s	400-650 l/s	400-650 l/s	220-365 l/s	220-365 l/s	220-365 l/s	0-99 l/s	220-365 l/s	220-365 l/s	220-365 l/s	0-99 l/s	0-99 l/s	0-99 l/s	0-99 l/s	Pumping Speed Range
Rotation speed adaptation %	62 - 100%	-	-	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	62 - 100%	Rotation speed adaptation %
Run-up Time min	5	-	-	5	5	5	5	5	5	2	2	2	2	2	5	2	2	2	2	Run-up Time min
Standard cooling	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Convection	Standard cooling
Technology Type	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Mechanical Turbo Pump	Technology Type
Ultimate Pressure Torr	<6.0x10-8	-	-	<6.0x10-8	<3.75x10-10	<3.75x10-10	<3.75x10-10	<6.0x10-8	<6.0x10-8	<6.0x10-8	<6.0x10-8	<3.75x10-10	<3.75x10-10	<3.75x10-10	<3.75x10-10	<6.0x10-8	<3.75x10-10	<6.0x10-8	<6.0x10-8	Ultimate Pressure Torr
Ultimate Pressure mbar	<8.0x10-8	3e-10	3e-8	<8.0x10-8	<5.0x10-10	<5.0x10-10	<5.0x10-10	<8.0x10-8	<8.0x10-8	<8.0x10-8	<8.0x10-8	<5.0x10-10	<5.0x10-10	<5.0x10-10	<5.0x10-10	<8.0x10-8	<5.0x10-10	<8.0x10-8	<8.0x10-8	Ultimate Pressure mbar
Vacuum Range	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	High Vacuum (10-4 - 10-8 mbar)	Ultra High Vacuum (10-9 - 10-12 mbar)	High Vacuum (10-4 - 10-8 mbar)	High Vacuum (10-4 - 10-8 mbar)	Vacuum Range
Weight lb	17	43	32	17	26	27	28	18	16	9	8	10	14	15	25	7	11	6	6	Weight lb