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TURBOVAC 850iX / RS485/ DN 160 ISO-K

The TURBOVAC pumps are turbomolecular pumps with mechanical rotor suspension which are used in the pressure range from 10-1 mbar (... Read more
Prt No. 840071V3300
225 l/s
290 l/s
430 l/s
720 l/s
900 l/s
1250 l/s
1380 l/s
38 l/s
90 l/s
(i) Standard Frequency Drive
(iR) Radiation Standard Frequency Drive
(iX) Enhanced Frequency Drive
DN 100 CF
DN 100 ISO-K
DN 160 CF
DN 160 ISO-K
DN 200 CF
DN 200 ISO-F
DN 200 ISO-K
DN 250 ISO-F
DN 250 ISO-K
DN 40 ISO-KF
DN 63 CF
DN 63 ISO-K
1
$18,423.00

Out of stockClick for availability
Lead time: 10 weeks

Sold by Leybold

Description

The TURBOVAC pumps are turbomolecular pumps with mechanical rotor suspension which are used in the pressure range from 10-1 mbar (0.75 x 10-1 Torr) to 10-10 mbar (0.75 x 10-10 Torr). Pumping speeds for air vary from 35 l/s (inlet flange diameter = 40 mm (1.57 in.)) to 925 l/s (inlet flange diameter = 200 mm (7.87 in.)). Mandatory accessories not included.

Technical specification

Be sure to check with the seller important parameter for you and inspect the goods upon receipt
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Sold ByLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldLeyboldSold By
Compression ratio Ar>1e11--------------->1e111.00E+11>1e11>1e111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+11Compression ratio Ar
Compression ratio H24.4e6---------------4.4e65.00E+074.4e64.4e61.00E+061.00E+061.00E+061.00E+061.00E+061.00E+062.00E+072.00E+075.00E+072.00E+072.00E+071.00E+061.00E+065.00E+075.00E+075.00E+075.00E+07Compression ratio H2
Compression ratio He1.3e8---------------1.3e81.00E+081.3e81.3e81.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+081.00E+08Compression ratio He
Compression ratio N2>1e11--------------->1e111.00E+11>1e11>1e111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+111.00E+11Compression ratio N2
Cooling water connectionplug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread---------------plug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternativeplug connection for 6x1 hose / alternatively G 1/8-in. screw-in threadplug connection for 6x1 hose / alternatively G 1/8-in. screw-in thread6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternative6x1 hose alternative, G 1/8" screw in thread 1/4" hose6x1 hose alternative, G 1/8 screw in thread<br />1/4" hose""x1 hose alternativeCooling water connection
Cooling water consumption l/h60-----------6060--60G 1/8" scr""1 ho"6060G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"G 1/8" scr""1 ho"30-60G 1/8" scr""1 ho"Cooling water consumption l/h
Cooling water pressure bar6---------------630-606650-10050-10050-10050-10050-10050-10030-6030-6030-6030-6030-6050-10050-10030-6030-606-Mar30-60Cooling water pressure bar
Cooling water temperature C/F15 to 35---------------15 to 353-615 to 3515 to 353 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 63 - 6+15 to 35 (+59 to +95)3 - 6Cooling water temperature C/F
Corrosive ResistantNo---------------NoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoNoCorrosive Resistant
Dimensions Height mm-----------------1945656216245222222216232196196200205205232245194200201194Dimensions Height mm
Dimensions Length mm------------------213213-----------------Dimensions Length mm
Dimensions Width mm-----------------105213213165165165165165165131131105131131165165105105105105Dimensions Width mm
Forevacuum flange (DN)-------------DN 40 KF-----------------------Forevacuum flange (DN)
Gas throughput Ar mbar l/s3.5-----------1212--3.533.53.5222222333332233TBD3Gas throughput Ar mbar l/s
Gas throughput H2 mbar l/s>15-----------1010-->1511>15>158888881111111111881111TBD11Gas throughput H2 mbar l/s
Gas throughput He mbar l/s21-----------1818--21112121888888661166881111TBD11Gas throughput He mbar l/s
Gas throughput N2 mbar l/s14-----------1717--141014144.54.54.54.54.54.56610664.54.51010TBD10Gas throughput N2 mbar l/s
Inlet connectionDN 160 ISO-K-------------DN 200 CFDN 200 ISO-KDN 160 CFDN 63 ISO-KDN 160 CFDN 160 ISO-KDN 160 ISO-K100 CF160 CF160 CFDN 160 ISO-KDN 100 ISO-KDN 100 ISO-KDN 100 ISO-K63 CF100 CF100 CFDN 100 ISO-K100 CFDN 63 ISO-K63 CFDN 40 ISO-KFDN 63 ISO-KInlet connection
Integrated vacuum system controller-----------------41nononononononononononononononononono41Integrated vacuum system controller
Lubrication TypeDry---------------DryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryDryLubrication Type
Mains Connection--------------------nonononononononononononononono24/48 V DC ±10%noMains Connection
Max. current consumption -----------------10A at 24 V DC------------------10A at 24 V DCMax. current consumption
Max. foreline pressure for N2 Torr-----------------10--77777710101010107710101010Max. foreline pressure for N2 Torr
Max. foreline pressure for N2 mbar15---------------151415151010101010101414141414101014141414Max. foreline pressure for N2 mbar
Max. power consumption W------------800800---240--240240240240240240240240240240240240240240240240240Max. power consumption W
Noise level dB(A)50---------------50415050----------------41Noise level dB(A)
Nominal rotation speed rpm49200---------------492007200049200492006000060000600006000060000600007200072000720007200072000600006000072000720007200072000Nominal rotation speed rpm
Operating temperature range C(F)+5 to +40---------------+5 to +40+5 to +45 (+41 to +113)+5 to +40+5 to +40+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)+5 to +45 (+41 to +113)Operating temperature range C(F)
Optional coolingAir/Water---------------Air/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterAir/WaterOptional cooling
Outlet connectionDN 25 ISO-KF---------------DN 25 ISO-KFDN 16 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 25 ISO-KFDN 25 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFDN 16 ISO-KFOutlet connection
Permissible cooling water pressure (bar)------------66-----------------------Permissible cooling water pressure (bar)
Permissible cooling water temperature °C------------15 to 3515 to 35-----------------------Permissible cooling water temperature °C
Power consumption at ultimate pressure (24V/48V) W-----------------240--2402402402402402402402402402402402402402402407/9.5240Power consumption at ultimate pressure (24V/48V) W
Power consumption at ultimate pressure W------------5050-----------------------Power consumption at ultimate pressure W
Product ConditionNew---------------NewCertified RebuiltNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewNewProduct Condition
Product Life Cycle StatusActive---------------Active-ActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveActiveProduct Life Cycle Status
Protection Class IP40---------------40Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+4040Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCAccessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+EtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DCEtherCAT)], Profibus, Ethernet/IP, 15-pin digital I/O interface, Profinet, RS 485 [Optional interface (RS 232, USB+, Accessory 3 pc. M8 connector 24 V DC40Accessory 1 pc. M8 connector 24 V DC, RS485, 15-Pin digital I/O, USB+Protection Class IP
Prt No.840071V3300 ✔850132V1000840091A00840111A00840081A00840071A00830081A00830071A00830061A00830051A00810041A00850122V1000850102V1000850092V1000840111V1000840091V1000840081V3300810031V1000R840081V1000840071V1000830071V1000830061V3300830081V1000830081V3300830071V3300830051V1000820051V3300820051V1000810041V1000820061V1000820061V3300830051V3300830061V1000810031V3300810041V3300810011V1000810031V1000Prt No.
Pumping Speed Ar l/s655-----------11501150840840655836556554002604004004002602102108321021026026083833683Pumping Speed Ar l/s
Pumping Speed H2 l/s755-----------11501150770770755787557554203504204204203502102107821021035035078783178Pumping Speed H2 l/s
Pumping Speed He l/s850-----------13501350925925850908508504403604404404403602502509025025036036090903990Pumping Speed He l/s
Pumping Speed N2 l/s720-----------12501250900900720-7207204302904304304302902252259022522529029090903890Pumping Speed N2 l/s
Pumping Speed Range685-900 l/s---------------685-900 l/s0-99 l/s685-900 l/s685-900 l/s400-650 l/s220-365 l/s400-650 l/s400-650 l/s400-650 l/s220-365 l/s220-365 l/s220-365 l/s0-99 l/s220-365 l/s220-365 l/s220-365 l/s220-365 l/s0-99 l/s0-99 l/s0-99 l/s0-99 l/sPumping Speed Range
Rotation speed adaptation %-----------------62 - 100%--62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%62 - 100%Rotation speed adaptation %
Run-up Time min-----------------2--55555522222552222Run-up Time min
Standard coolingConvection---------------ConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionConvectionStandard cooling
Technology TypeMechanical Turbo Pump---------------Mechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpMechanical Turbo PumpTechnology Type
Ultimate Pressure Torr-----------------<6.0x10-8--<6.0x10-8<3.75x10-10<3.75x10-10<3.75x10-10<6.0x10-8<6.0x10-8<6.0x10-8<6.0x10-8<3.75x10-10<3.75x10-10<3.75x10-10<6.0x10-8<3.75x10-10<6.0x10-8<3.75x10-10<6.0x10-8<6.0x10-8Ultimate Pressure Torr
Ultimate Pressure mbar3e-10------------< 7.5 x 10-9--3e-10<8.0x10-83e-103e-8<8.0x10-8<5.0x10-10<5.0x10-10<5.0x10-10<8.0x10-8<8.0x10-8<8.0x10-8<8.0x10-8<5.0x10-10<5.0x10-10<5.0x10-10<8.0x10-8<5.0x10-10<8.0x10-8<5.0x10-10<8.0x10-8<8.0x10-8Ultimate Pressure mbar
Ultimate Total Pressure mbar------------< 7.5 x 10-9------------------------Ultimate Total Pressure mbar
Vacuum RangeHigh Vacuum (10-4 - 10-8 mbar)---------------High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)Ultra High Vacuum (10-9 - 10-12 mbar)High Vacuum (10-4 - 10-8 mbar)High Vacuum (10-4 - 10-8 mbar)Vacuum Range
Weight (kg)15.1-----------24.323.5--20.1--------------------Weight (kg)
Weight lb-----------------6433217262728181698101415172571166Weight lb

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